Brand: Lam Research
Model: 810-017003-004
Part No: 810-017003-004
Describe: Semiconductor Equipment Component
Status: New/Used
LAM 810-017003-004 Semiconductor Equipment Component
LAM 810-017003-004
LAM 810-017003-004 is a high-frequency digital interface board tailored by LAM Research for the 4420/4428 Rainbow and 9400/9600 series etching platforms. It is responsible for high-speed differential signal isolation and forwarding between the RF matching device, ESC power supply, and host. Onboard 32 channel optocoupler isolated DI/DO, supporting 400 MHz LVDS level, can complete state switching within 1 μ s, providing real-time interlocking and status feedback for 13.56 MHz RF systems.
Email: [email protected]
LAM 810-017003-004 是 LAM Research 为 4420/4428 Rainbow 及 9400/9600 系列刻蚀平台量身定制的高频数字接口板,负责射频匹配器、ESC 电源与主机之间的高速差分信号隔离与转发。 板载 32 路光耦隔离 DI/DO,支持 400 MHz LVDS 电平,可在 1 μs 内完成状态切换,为 13.56 MHz 射频系统提供实时联锁与状态反馈。
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